首页 | 本学科首页   官方微博 | 高级检索  
     

精确确定半导体材料临界点的能量值
引用本文:张淑芝,张燕峰,连洁. 精确确定半导体材料临界点的能量值[J]. 半导体光电, 1999, 0(1): 1
作者姓名:张淑芝  张燕峰  连洁
作者单位:山东大学,济南,250100
摘    要:分析表明波长调制反射谱的实质,是介电函数对能量的一级微商。导出了弱电场调制反射谱与介电函数对能量的三级微商成正比,将MOCVD方法生长的GaInP以及掺Si和掺Zn三个样品,用椭偏光谱法测量得到可见光区的介电函数谱,并求其一级和三级微商谱。将用于分析电反射谱的三点法推广用于分析介电函数的一级和三级微商谱,得到波长调制和弱电场调制反射谱的实验结果,并与介电函数谱的结果加以比较,使灵敏度和分辨率有很大提高

关 键 词:半导体材料  椭圆偏振光谱  临界点  阈值能量

Accurate determination on energy at critical point of semiconductor materials
ZHANG Shuzhi,ZHANG Yanfeng,LIAN Jie. Accurate determination on energy at critical point of semiconductor materials[J]. Semiconductor Optoelectronics, 1999, 0(1): 1
Authors:ZHANG Shuzhi  ZHANG Yanfeng  LIAN Jie
Abstract:It is shown that the wavelength modulated reflective spectrum is essentially the first derivative of dielectric function with respect to the energy. It was derived that the modulated reflective spectrum of weak electric field is proportional to the third derivative of the dielectric function with respect to the energy. The dielectric function spectra for GaInP and doped Si or Zn GaInP samples grown by MOCVD are obtained in the visible region by using the ellipsometric spectroscopy, and the first and third derivative spectra are evaluated. Extending the three-point-scaling used in analyzing the electric reflective spectrum, the first and third derivative spectra of the dielectric functions can be analyzed. The experimental results of reflective spectra of wavelength modulation and weak electric field modulation are obtained and are compared with that of dielectric function spectra,which shows that the sensitivity and resolution are remarkably improved.
Keywords:Semiconductor Materials  Ellipsometric Spectroscopy  Critical Point  Threshold Energy
本文献已被 CNKI 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号