| 微器件表面3D形貌的新型微/纳米探头测量系统 |
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| 引用本文： | 陈叶金,范光照,刘玉圣.微器件表面3D形貌的新型微/纳米探头测量系统[J].计量学报,2006,27(1):12-17. |
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| 作者姓名： | 陈叶金 范光照 刘玉圣 |
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| 作者单位： | 1. 合肥工业大学仪器仪表学院,安徽,合肥,230009
2. 合肥工业大学仪器仪表学院,安徽,合肥,230009;台湾大学机械工程学系,台湾,台北,106 |
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| 摘 要： | 采用DVD光碟机的激光读取头,开发出微器件表面3D形貌的新型微/纳米测量系统。分析了激光读取头内部结构与运作原理,当反射面不在聚焦位置时,经四象限传感器探测聚焦误差信号(FES),驱动音圈马达以带动物镜重回聚焦位置,完成自动聚焦过程。并对音圈马达具有的磁滞现象加以研究,应用Preisach磁滞模型补偿磁滞误差,进而提高激光读取头在测量方面的精确度。结合HP激光干涉仪对测头不同测量范围的标准差与重复性进行校正测量,由校正的结果分析,此测头系统可实现微器件表面3D形貌的微/纳米测量。
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| 关 键 词： | 计量学 微/纳米探头 激光读取头 聚焦误差信号 音圈马达 磁滞补偿 |
| 文章编号： | 1000-1158（2006）01-0012-06 |
| 收稿时间： | 2004-11-18 |
| 修稿时间： | 2005-05-11 |
An Innovative Micro/nano Probe Measurement System for 3D Profile of Microcomponent |
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| CHEN Ye-jin,FAN Kuang-chao,LIU Yu-sheng.An Innovative Micro/nano Probe Measurement System for 3D Profile of Microcomponent[J].Acta Metrologica Sinica,2006,27(1):12-17. |
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| Authors: | CHEN Ye-jin FAN Kuang-chao LIU Yu-sheng |
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| Affiliation: | 1. Hefei University of Technology, Hefei, Anhui 230009, China; 2. Department of Mechanical Engineering, Taiwan University, Taipei, Taiwan 106, China |
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| Abstract: | The DVD pickup head is adopted to develop an innovative micro/nano-measuring system for the 3D surface figures of microcomponent.The structure and operational theory of probe are analyzed,when the reflective plane away from the focus position,the focus error signal(FES) can be detected by a four-quadrant photodiode.The voice coil motor(VCM) took back the objective lens to the focus position for achieving auto-focusing by FES.The hysteresis in VCM is studied,and the hysteresis error is compensated with Preisach model,so the system can improve the measurement accuracy.By combining with the HP laser interferometer,the standard error and repeatability of probe is calibrated in different measurement ranges.From these calibration results,the probe is adaptive to achieve micro/nano measurment for the 3D profile of microcomponent. |
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| Keywords: | Metrology Micro/nano probe Pickup head Focus error signal Voice coil motor Hysteresis compensation |
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