Control of dynamic microsystems

This paper formulates and solves control problems for nonlinear microsystems which comprise micro-electromechanical devices, micromachined transducers and microelectronics. We perform a consistent dynamic analysis and coherent designs with a minimum level of simplifications using high-fidelity mathematical models. The proposed methodology enables practical implementation for multi-input/multi-output systems due to overall conceptual consistency, design coherence, computational efficiency, algorithmic effectiveness and hardware simplicity. Various issues in nonlinear analysis and control are examined and experimentally verified substantiating design concepts for high-performance microsystems. The reported findings are demonstrated for a proof-of-concept closed-loop electrostatic microactuator.