High‐Resolution Spin‐on‐Patterning of Perovskite Thin Films for a Multiplexed Image Sensor Array |
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Authors: | Woongchan Lee Jongha Lee Huiwon Yun Joonsoo Kim Jinhong Park Changsoon Choi Dong Chan Kim Hyunseon Seo Hakyong Lee Ji Woong Yu Won Bo Lee Dae‐Hyeong Kim |
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Affiliation: | 1. Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, Republic of Korea;2. School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University (SNU), Seoul, Republic of Korea;3. School of Chemical and Biological Engineering, Seoul National University (SNU), Seoul, Republic of Korea |
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Abstract: | Inorganic–organic hybrid perovskite thin films have attracted significant attention as an alternative to silicon in photon‐absorbing devices mainly because of their superb optoelectronic properties. However, high‐definition patterning of perovskite thin films, which is important for fabrication of the image sensor array, is hardly accomplished owing to their extreme instability in general photolithographic solvents. Here, a novel patterning process for perovskite thin films is described: the high‐resolution spin‐on‐patterning (SoP) process. This fast and facile process is compatible with a variety of spin‐coated perovskite materials and perovskite deposition techniques. The SoP process is successfully applied to develop a high‐performance, ultrathin, and deformable perovskite‐on‐silicon multiplexed image sensor array, paving the road toward next‐generation image sensor arrays. |
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Keywords: | dewetting high‐resolution patterning perovskite patterning perovskite photodiode |
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