<100> Textured Diamond Film on Silicon Grown by Hot Filament Chemical Vapor Deposition |
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| Authors: | Xuanxiong ZHANG Tiansheng SHI Xikang ZHANG |
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| Affiliation: | Xuanxiong ZHANG,Tiansheng SHI and Xikang ZHANG (State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Metallurgy,Chinese Academy of Sciences,Shanghai,,China) |
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| Abstract: | The <100> textured growth of diamond film on HF eroded silicon wafer has been studied by HFCVD. The evolution of grain size and sudece morphology vs deposition time is presented and the <100> textured thick diamond film (80μm) with smooth surface, desirable for practical application in many fields is obtained |
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