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Variable width based stepped MEMS cantilevers for micro or pico level biosensing and effective switching
Authors:Deep Kishore Parsediya  Jawar Singh  Pavan Kumar Kankar
Affiliation:1. Madhav Institute of Technology and Science, Race Course Road, Gola Ka Mandir, Gwalior, M.P., 474005, India
2. Department of Electronics and Communication Engineering, PDPM-IIITDM, Jabalpur, M.P., 482005, India
3. Department of Mechanical Engineering, PDPM-IIITDM, Jabalpur, M.P., 482005, India
Abstract:
Keywords:
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