激光能量波动对扫描法尺寸测量精度的影响

在激光扫描法尺寸测量系统中，激光能量必须保持稳定。但是，在实际使用中，激光器输出能量会产生波动，导致系统检测精度下降甚至不准确。本文详细分析了能量波动对激光扫描法尺寸测量精度的影响，并给出了激光器输出能量自动测量电路及测量方法，以及能量波动的电补偿方法。该方法在激光外径在线检测仪中得到了很好的应用，实践证明有效、可行。

Effect of Laser Energy Changing on Accuracy of Size Measurement by Laser Scanning

In the system of size measurement by laser scanning, i t is necessary to keep laser energy stability. But in fact, output of laser energy is continuously changing as time passed, so that precision accuracy of detectin g system become poor. This paper analyzes the relationship between accuracy of size measurement and laser energy changing, puts forward laser energy auto-measu red and self-correct circuit. By experiment the method of electrical compensatio n for laser energy change gets satisfying result. It is applied to instrument of diameter mea surement by laser scaning successfully, which is effective and fea sible.