| 300mm立式炉恒温区测量系统的设计与实现 |
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| 引用本文： | 王艾,徐冬.300mm立式炉恒温区测量系统的设计与实现[J].电子工业专用设备,2012,41(3):27-30. |
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| 作者姓名： | 王艾 徐冬 |
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| 作者单位： | 北京七星华创电子股份有限公司集成电路工艺设备研发中心,北京,101312 |
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| 摘 要： | 针对300 mm立式炉设备恒温区测量的需求,设计并实现了一套恒温区测量的软硬件系统。硬件系统由电机、电机驱动器、PLC模块、工控机、热电偶等组成。同时为了更加灵活方便的操作恒温区测量装置,设计了一套完整的控制软件系统,实现热电偶的3种运动控制模式,显示热电偶当前的状态——运动速度、位置、温度,保存温度、位置等数据。恒温区测量实验表明,该系统能满足立式炉设备恒温区测量功能的需求,现已成功应用于300 mm立式氧化炉设备。
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| 关 键 词： | 立式炉 恒温区 PLC |
Flat Zone Temperature Design and Realization for Measurement System 300 mm Vertical Furnace |
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| WANG Ai,XU Dong.Flat Zone Temperature Design and Realization for Measurement System 300 mm Vertical Furnace[J].Equipment for Electronic Products Marufacturing,2012,41(3):27-30. |
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| Authors: | WANG Ai XU Dong |
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| Affiliation: | (IC Processing Equipment R＆D Center, Beij ing Sevenstar Electronics Co., Ltd., B eijing 101312, China) |
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| Abstract: | For the technical requirements of 300 mm vertical furnace flat zone temperature measurement, a hardware and software system was designed and realized. The hardware system consisted of motor, motor driver, PLC, IPC, thermocouple. In order to operate the measurement device conveniently, a control software system was developed. The software system could perform three move modes of the thermocouple, display current status of the thermocouple such as speed, position, temperature, and save data. Finally, the flat zone temperature measurement experiment results indicated that the control system could successfully meet the requirements of 300mm vertical furnace. |
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| Keywords: | Vertical Furnace Flat Zone PLC |
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