| 工艺参数对VO2薄膜质量的影响研究 |
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| 引用本文： | 乔威,赵昆渝,李智东,孟召标. 工艺参数对VO2薄膜质量的影响研究[J]. 云南冶金, 2006, 35(6): 44-49 |
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| 作者姓名： | 乔威 赵昆渝 李智东 孟召标 |
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| 作者单位： | 昆明理工大学材料与冶金工程学院,云南,昆明,650093 |
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| 摘 要： | 以V2O4粉末为原料，采用无机sol-gel法在非晶玻璃上制备了V2O5干凝胶膜。后通过两步热处理工艺法成功制备出了具有良好相变性质的VO2薄膜。并对其相成分、退火时间、温度、膜厚、电学性能等进行了分析，比较了各工艺参数对VO2薄膜性能的影响。
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| 关 键 词： | 无机sol-gel法 VO2薄膜 相变性质 |
| 文章编号： | 1006-0308(2006)06-0044-06 |
| 收稿时间： | 2006-06-28 |
| 修稿时间： | 2006-06-28 |
Reseach on the Effects of Technological Parameters on the Quality of VO2 Thin Films |
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| QIAO Wei,ZHAO Kun-yu,LI Zhi-dong,MENG Zhao-biao. Reseach on the Effects of Technological Parameters on the Quality of VO2 Thin Films[J]. , 2006, 35(6): 44-49 |
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| Authors: | QIAO Wei ZHAO Kun-yu LI Zhi-dong MENG Zhao-biao |
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| Affiliation: | Kunming University of Science and Technology, Kunming, Yunnan 650093, China |
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| Abstract: | The vanadium pentoxide dry gelatin films were prepared by inorganic sol - gel methed from V2O4 powders. Then the vanadium dioxide thin films with excellent phase transitior properties have been successfully prepared through two processing steps. The phase compositions, annealing time, tersperature, thickness and electrical properties of VO2 thin films were analyzed. And the effects of process parameters on the properties of VO2 thin film have been compared. |
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| Keywords: | inorganic sol-gel VO2 thin films phase transitior properties |
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