双定子静电微电机控制系统的信号检测研究

介绍了一种基于悬浮转子微陀螺的双定子轴向静电微电机控制系统的信号检测方法,它对实现悬浮转子旋转驱动的闭环控制尤为重要,其主要特点是采用互相关检测—锁定放大、DSP控制直接数字频率合成(DDS)产生正弦波,并通过实际正弦波发生电路和系统仿真验证其可行性,这些提供了解决微小电容检测在实际电路实现上的一些关键问题的办法,为实际电路参数选择提供重要参考。

Study on signal detection of control system of electrostatically micromachined motor with two stators

Based on an electrostatically micromachined motor(EMM) used in the levitated rotor micromachined rotational gyroscope,the new capacitance signal detection method of the control system of EMM is presented.It is important for realizing the closed-loop control of the rotation of the levitated rotor.The main characteristic is using the cross-correlation detection & lock-in principle and sine wave generator with DDS controled by DSP.The feasibility is validated by the sine wave generate circuit and system simulation.It gives a way to solve some key problems got in the weak-small capacitance signal detection in practical circuit,it also provides a important reference for the cholce of practical circuit parameters.