聚合物波导马赫-曾德折射率传感器的设计和制备

以聚合物ZPU44和ZPU46作为波导包层和芯层材料,设计并制备了基于Mach-Zehnder干涉仪(MZI)的集成折射率传感器。设计并优化了波导截面参数、弯曲半径和传感窗长度等结构参数,分析了其折射率传感特性,进而采用光刻、反应离子刻蚀(RIE)等传统的微加工工艺制备了聚合物MZI折射率传感芯片。测试结果表明,制备的聚合物MZI传感器在1.33~1.44的折射率变化范围内具有较好的线性度,折射率灵敏度约为88dBm/RIU,与设计基本符合。本文的聚合物折射率传感器传感窗长度小,容易实现阵列化,在生化传感领域有很好的应用前景。

Design and fabrication of polymer MZI refractive index sensors

An integrated optic Mach-Zehnder interferometer (MZI) sensor which uses the ZPU44and ZPU46polymers as the core and upper cladding materials is designed and fabricat ed.The structure parameters,including as the waveguide cross section shape,bending radius and the length of the sensing window,are designed and optimized.Also the refractive index sens ing properties are analyzed and then the designed polymer Mach-Zehnder interferometer sensor i s fabricated using the traditional mirco-fabrication technology,namely,the contact p hotolithography and reactive ion etching (RIE).The measuring results show the polymer Mach-Zehnder interferometer sensor has a linear response to the refractive index changing from 1.33to 1.44, and the sensitivity of the sensor can reach the value of 88dBm/RIU,which matche s the theoretical results well.The length of the sensing area is very small and th is polymer sensor can be integrated easily and has wide prospects for applications in the chemical and biological sensor fields.