| 基于MEMS技术的水平轴光纤加速度传感器 |
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| 引用本文： | 王小伟,钟少龙,徐静,吴亚明.基于MEMS技术的水平轴光纤加速度传感器[J].光电子．激光,2015,26(3):414-421. |
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| 作者姓名： | 王小伟 钟少龙 徐静 吴亚明 |
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| 作者单位： | 中国科学院 上海微系统与信息技术研究所,传感技术国家重点实验室 上海 200050 ;中国科学院大学 微系统与信息技术学院,上海 200050;中国科学院 上海微系统与信息技术研究所,传感技术国家重点实验室 上海 200050;中国科学院 上海微系统与信息技术研究所,传感技术国家重点实验室 上海 200050;中国科学院 上海微系统与信息技术研究所,传感技术国家重点实验室 上海 200050 |
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| 基金项目： | 国家重大科学仪器设备开发专项(2012YQ2500021401)资助项目 (1.中国科学院上海微系统与信息技术研究所,传感技术国家重点实验室上海 200050; 2.中国科学院大学微系统与信息技术学院,上海 200050) |
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| 摘 要： | 提出了一种基于微机电系统(MEMS)技术的水平轴光纤加速度传感器,并与Z轴光纤加速度传感器在同一MEMS芯片上制造,形成单一方向出纤的三轴光纤加速度传感器。分析了器件工作原理和器件结构参数与其性能的关系,利用MEMS技术成功制作出了加速度传感器样品。初步测试结果表明,本光纤加速度传感器灵敏度为164mV/g,3dB带宽的截止频率为1 600Hz。
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| 关 键 词： | 微机电系统(MEMS) 加速度传感器 水平轴加速度传感器 光纤加速度传感器 |
| 收稿时间： | 2014/11/11 0:00:00 |
MEMS-based horizontal axis optic fiber acceleration sensor |
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| WANG Xiao-wei,ZHONG Shao-long,XU Jing and WU Ya -ming.MEMS-based horizontal axis optic fiber acceleration sensor[J].Journal of Optoelectronics·laser,2015,26(3):414-421. |
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| Authors: | WANG Xiao-wei ZHONG Shao-long XU Jing and WU Ya -ming |
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| Affiliation: | State Key Laboratory of Transducer Technology,Shanghai Institute of Microsys tem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China ;School of Microsystem and Information Technology,University of Chinese Acade my of Sciences, Shanghai 200050,China;State Key Laboratory of Transducer Technology,Shanghai Institute of Microsys tem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;State Key Laboratory of Transducer Technology,Shanghai Institute of Microsys tem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;State Key Laboratory of Transducer Technology,Shanghai Institute of Microsys tem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China |
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| Abstract: | Fiber optic acceleration sensors are important acceleration sensors,w hich are widely used in the national economy and national defense industries.In this paper,we present a micro-electro-mechanical system (MEMS)-based horizontal axis fiber-optic acceleration sensor,which can be integrated with t he Z-axis optical fiber acceleration senor to form a monolithic three-axis optical acceleration senor w hose optical fiber outlets are in the same direction.The sensing theory has been proposed and the MEMS acc eleration sensor chip has been fabricated and packaged successfully.The preliminary test results show that the sensitivity of MEMS-based fiber-optic acceleration sensor is 164mV/g,and the 3dB bandwid th is 1600Hz. |
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| Keywords: | micro-electro-mechanical system (MEMS) acceleration sensor horizontal axis a cceleration sensor fiber-optic acceleration sensor |
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