| SiO2基Mach-Zehnder型传感芯片的制备与敏感性研究 |
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| 引用本文： | 吴远大.SiO2基Mach-Zehnder型传感芯片的制备与敏感性研究[J].光电子．激光,2011(2):159-162. |
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| 作者姓名： | 吴远大 |
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| 作者单位： | 中国科学院半导体研究所光电子研究发展中心; |
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| 基金项目： | 国家自然科学基金资助项目(60707008,60977045); 国家“863”计划资助项目(2007AA03Z420); 中科院半导体所知识创新工程前沿方向资助项目(ISCAS2008T09) |
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| 摘 要： | 设计并制作了一种基于SiO2/Si材料的Mach-Zehnder干涉仪(MZI)型集成光波导传感芯片.采用不同浓度的NaCl溶液对传感芯片的敏感特性进行了测试分析,研究结果表明,该传感芯片对特定浓度NaCl溶液的响应和恢复时间分别为1.0 s和0.6 s,可测最小折射率变化为2×10-4RIU(单位折射率变化),在Na...
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| 关 键 词： | Mach-Zehnder干涉仪(MZI) 光波导传感 NaCl溶液 SiO2/Si 敏感性 |
The sensing properties of Mach-Zehnder sensor chip based on SiO_2 |
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| WU Yuan-da.The sensing properties of Mach-Zehnder sensor chip based on SiO_2[J].Journal of Optoelectronics·laser,2011(2):159-162. |
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| Authors: | WU Yuan-da |
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| Affiliation: | WU Yuan-da,JIANG Ting,AN Jun-ming,LI Jian-guang,WANG Yue,WANG Hong-jie,HU Xiong-wei(R&D Center of Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China) |
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| Abstract: | An integrated Mach-Zehnder interferometer(MZI) sensor chip was designed and fabricated based on SiO2/Si.And the sensing properties were tested using NaCl solution.The tested results show that the response and recovery time of the chip to NaCl solution are 1.0 s and 0.6 s,respectively,the minimum detectable refractive index variation is 2×10-4 RIU,and a good linear response is presented within the refractive index from 1.348 8 to 1.373 6.The feasibility of applying the MZI platform for highly sen... |
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| Keywords: | Mach-Zehnder interferometer(MZI) optical waveguide sensor NaCl solution SiO2/Si sensitivity |
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