| AlxZn1-xO合金MSM光电探测器的研究 |
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| 引用本文： | 韦敏. AlxZn1-xO合金MSM光电探测器的研究[J]. 光电子．激光, 2011, 0(2): 228-231 |
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| 作者姓名： | 韦敏 |
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| 作者单位： | 电子科技大学电子薄膜与集成器件国家重点实验室; |
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| 基金项目： | 国家自然科学基金资助项目(50802012); 电子薄膜与集成器件国家重点实验室创新基金资助(CXJJ200901); 中央高校基本科研业务费专项资金资助项目 |
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| 摘 要： | 在Si衬底上磁控溅射制备AlxZn1-xO(AZO)合金薄膜,在其上真空蒸发Ni/Au叉指电极获得金属-半导体-金属(MSM)结构光电探测器.采用UV-Vis-Nir分光光度计测量AZO系列薄膜的光吸收特性,观察到AZO 合金薄膜的光学吸收带边随Al含量增加明显蓝移.测试AZO探测器的电流电压特性、时间特性和响应光谱发...
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| 关 键 词： | AlxZn1-xO(AZO) 光电探测器 合金 金属-半导体-金属(MSM) |
MSM photodetectors based on Al_xZn_(1-x)O alloys |
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| WEI Min. MSM photodetectors based on Al_xZn_(1-x)O alloys[J]. Journal of Optoelectronics·laser, 2011, 0(2): 228-231 |
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| Authors: | WEI Min |
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| Affiliation: | WEI Min,DENG Hong,DENG Xue-ran,CHEN Jin-ju(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China) |
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| Abstract: | AlxZn1-xO(AZO)alloy thin films were deposited on Si substrates by RF magnetron sputtering,and photodetectors were fabricated on these AZO thin films by using Ni/Au as contact metal,forming a metal-semiconductormetal(MSM) structure with interdigital(IDT) configuration.Optical transmission spectra tested by a UV-Vis-Nir spectrometer indicate that the absorption edge has obvious blue shift with Al concent increasing.I-V characteristics,time response and spectra response of the detectors were investigated.With ... |
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| Keywords: | AlxZn1-xO(AZO) photodetector alloys metal-semiconductor-metal(MSM) |
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