| 用于光互连的聚硅氧烷脊型光波导研究 |
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| 引用本文： | 冯向华.用于光互连的聚硅氧烷脊型光波导研究[J].光电子．激光,2011(1):38-41. |
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| 作者姓名： | 冯向华 |
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| 作者单位： | 国防科技大学光电科学与工程学院;解放军信息工程大学理学院;国防科技大学计算机学院; |
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| 基金项目： | 国家“863”高技术发展计划资助项目(2007AA01Z2a5) |
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| 摘 要： | 采用软成型和图案转移技术,制备了可用于高速芯片间光互连的大尺寸聚硅氧烷脊型光波导,光波导长度达23cm.利用有效折射率法,对芯层残留层和传输模场的关系进行了分析.采用截断和数字化散射两种方法,测得输入光波长为633nm时的平均传输损耗小于0.14dB/cm.研究结果表明,波导的长度和损耗指标满足高速芯片间光互连的要求.
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| 关 键 词： | 片间光互连 聚硅氧烷波导 软成型 图案转移 传输损耗 |
Study on polysiloxane ridge multimode optical waveguides for optical interconnection |
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| FENG Xiang-hua.Study on polysiloxane ridge multimode optical waveguides for optical interconnection[J].Journal of Optoelectronics·laser,2011(1):38-41. |
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| Authors: | FENG Xiang-hua |
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| Affiliation: | FENG Xiang-hua1,3,WEN Chang-li1,JI Jia-rong1,DOU Wen-hua2(1.College of Optoelectronic Science and Engineering,National University of Defense Technology,Changsha 410073,China,2.College of Computer,3.College of Science,Information Engineering University of the PLA,Zhengzhou 450001,China) |
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| Abstract: | Large-scale polysiloxane ridge multimode optical waveguides applied for inter-chip optical interconnection were designed and fabricated by the soft molding and pattern transferring.Length of the fabricated waveguides was more than 23 cm.The relationship between core residual layer and propagation mode was analyzed by the effective refractive index method.The optical propagation loss of waveguides was 0.14 dB/cm measured by the cutback method and 0.13 dB/cm measured by CCD camera photographing method at 633 ... |
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| Keywords: | inter-chip optical interconnection polysiloxane waveguide soft molding pattern transferring propagation loss |
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