Analysis of persistent photoconductivity due to potential barriers |
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Authors: | Jeremiah R Lowney Santos Mayo |
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Affiliation: | (1) Semiconductor Electronics Division, National Institute of Standards and Technology, 20899 Gaithersburg, MD |
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Abstract: | Persistent photoconductivity has been seen in thin silicon resistors fabricated with SIMOX material at temperatures between
60 and 220 K. This effect has been attributed to the depletion of carriers near the interface between the top silicon layer
and the buried oxide, which is due to the large number of surface traps at this interface. The depletion of carriers is accompanied
by a built-in field on the order of 10,000 V/cm, which causes a potential barrier that is nearly a quarter of the energy gap
of silicon. The theory of the recombination kinetics of majority carriers with minority carriers trapped at the interface
on the other side of a potential barrier is studied. Both the possibilities of tunneling and thermal activation have been
considered. The results show that thermal activation dominates at the temperatures of our measurements in SIMOX material,
while at lower temperatures tunneling would dominate. |
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Keywords: | Interface states persistent photoconductivity SIMOX |
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