| LDS激光打标机的振镜扫描失真分析及矫正 |
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| 引用本文： | 谢永迅,麦焯伟,杜建铭,龙泉. LDS激光打标机的振镜扫描失真分析及矫正[J]. 机床与液压, 2015, 43(5): 53-56 |
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| 作者姓名： | 谢永迅 麦焯伟 杜建铭 龙泉 |
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| 作者单位： | 深圳大学机电与控制工程学院,广东深圳,518060 |
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| 基金项目： | 广东省自然科学基金资助项目，深圳市战略新兴产业发展专项资金基础研究项目 |
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| 摘 要： | LDS(Laser Direct Structuring)激光打标机的振镜扫描系统存在失真问题,从而造成动态聚焦误差。对激光振镜扫描系统失真问题进行了详细理论分析,建立了该振镜扫描系统的数学模型,讨论了振镜动态聚焦误差来源和误差表现,提出了LDS振镜扫描系统误差矫正方法,通过实验验证了该方法的可行性。
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| 关 键 词： | LDS 激光振镜 动态聚焦 误差分析 误差矫正 |
Error Analysis and Correction of Laser Marking System Galvanometer Scanning |
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| XIE Yongxun,MAI Zhuowei,DU Jianming,LONG Quan. Error Analysis and Correction of Laser Marking System Galvanometer Scanning[J]. Machine Tool & Hydraulics, 2015, 43(5): 53-56 |
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| Authors: | XIE Yongxun MAI Zhuowei DU Jianming LONG Quan |
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| Abstract: | Distortion exist in galvanometer scanning system of LDS (Laser Direct Structuring) laser marking system. And this problem may result in dynamic focus error. In this paper, the theoretical analysis of laser galvanometer system was presented. The mathematical model was established and solved as well. According to the analysis results, the cause and the performance of dynamic focus error are discussed. The corresponding error correction method is proposed. And this method is verified by experiment. |
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| Keywords: | LDS Laser galvanometer dynamic focus Error analysis Error correction |
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