| BaTiO3/SrTiO3多层膜的制备及其介电性质 |
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| 引用本文： | 葛水兵,宁兆元.BaTiO3/SrTiO3多层膜的制备及其介电性质[J].功能材料,2004,35(6):711-712,715. |
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| 作者姓名： | 葛水兵 宁兆元 |
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| 作者单位： | 苏州大学,物理系,江苏,苏州,215006;苏州大学,物理系,江苏,苏州,215006 |
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| 基金项目： | 国家自然科学基金资助项目(10204016);苏州大学青年教师研究基金资助项目(Q3108303) |
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| 摘 要： | 采用脉冲激光沉积法在Pt／Ti／SiO2／Si衬底上制备了BaTiO3／SrTiO3(BTO／STO)多层膜。XRD结果表明：多层膜呈现出明显的(110)择优取向，与Ba0.5Sr0．5TiO3单层膜相比，多层膜的相对介电常数得到了明显的增强，而介电损耗仍然保持在较低的水平。室温下频率为10kHz时，BTO／STO(n=6)多层膜的相对介电常数为506，而介电损耗仅为0．033。薄膜的C-V特性研究表明：多层膜呈现出较好的电容调谐度。
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| 关 键 词： | 多层膜 介电性质 脉冲激光沉积 |
| 文章编号： | 1001-9731(2004)06-0711-02 |
Preparation and dielectric properties of BaTiO3/SrTiO3 multilayer thin films |
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| GE Shui-bing,NING Zhao-yuan.Preparation and dielectric properties of BaTiO3/SrTiO3 multilayer thin films[J].Journal of Functional Materials,2004,35(6):711-712,715. |
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| Authors: | GE Shui-bing NING Zhao-yuan |
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| Abstract: | BaTiO_3/SrTiO_3 (BTO/STO) multilayer films have been fabricated on Pt/Ti/SiO_2/Si substrates by a pulsed laser deposition method. From X-ray diffraction patterns, the multilayer structures have been formed, and indicating the single films are polycrystalline, while the multilayer films show a preferred orientation in (110) reflection. The dielectric constant of multilayer thin films was obviously enhanced, and the corresponding dielectric loss was remained at a low level. At a frequency of 10 kHz, a large dielectric constant of 506 was found in BTO/STO (n=6) multilayer films at room temperature, whose dielectric loss was only 0.033. From electrical measurement, BTO/STO multilayer films show a dielectric tunability of 28.8%. |
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| Keywords: | multilayer thin films dielectric properties pulsed laser deposition |
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