V型和Z型电热微驱动器性能比较与分析（邀请论文）

提出一种用于V型和Z型电热微驱动器性能比较的拓扑结构和标准,建立了在真空工作环境下V型和Z型电热微驱动器系统分析与比较模型.有限元仿真分析和实验结果验证了分析模型的准确性和有效性.借助此分析模型及所提出的性能比较拓扑结构和标准,综合分析和比较了V型和Z型电热微驱动器随不同结构参数变化时输出位移和力性能,为V型和Z型电热微驱动器的合理选择、系统设计与分析提供了可靠和实用的指导.

Performance Comparison and Analysis of V- and Z-shaped Electrothermal Actuators ( Invited Paper)

This paper presents a topological layout and benchmark that enables the systematic performance comparison between V- and Z-shaped electrothermal micro-actuators. A common analytical model of both V-and Z-shaped micro-actuators operating in vacuum conditions is established and verified by finite-element analysis and experimental results. Based on the analytical model and the proposed topological layout and benchmark, the performance of V-and Z-shaped actuators is compared in terms of output displacement and force with varying structural parameters, which provides a reliable and practical guidance on the reasonabe selection, systematic design, and analysis of the V- and Z-shaped electrothermal micro-actuators.