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Epitaxial Ferroelectric Heterostructures Fabricated by Selective Area Epitaxy of SrRuO3 Using an MgO Mask |
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| Authors: | J. Karthik Anoop R. Damodaran Lane W. Martin |
| Affiliation: | Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois, Urbana‐Champaign, Urbana, IL 61801, USA |
| Abstract: | |
| Keywords: | epitaxial heterostructures ferroelectrics hard mask dielectric materials PbZr0.2Ti0.8O3 |