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Nanotransfer Printing with sub‐10 nm Resolution Realized using Directed Self‐Assembly |
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| Authors: | Jae Won Jeong Woon Ik Park Lee‐Mi Do Jong‐Hyun Park Tae‐Heon Kim Geesung Chae Yeon Sik Jung |
| Affiliation: | 1. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak‐ro, Yuseong‐gu, Daejeon 305‐701, Republic of Korea;2. RFID/USN Research Department, Electronics and Telecommunications Research Institute (ETRI), 218 Gajeong‐dong Yuseong‐gu, Daejeon 305‐700, Republic of Korea;3. Material R&D Department, LG Display Co., Ltd., 1007, Deogeon‐ri,Wollong‐myeon, Paju‐si, Gyeonggi‐do, 413‐811, Republic of Korea |
| Abstract: | |
| Keywords: | nanotransfer printing soft lithography block copolymers self‐assembly polydimethylsiloxane |