Organic Thin‐Film Transistors with Anodized Gate Dielectric Patterned by Self‐Aligned Embossing on Flexible Substrates |
| |
Authors: | Yiheng Qin Daniël H Turkenburg Ionut Barbu Wiljan T T Smaal Kris Myny Wan‐Yu Lin Gerwin H Gelinck Paul Heremans Johan Liu Erwin R Meinders |
| |
Affiliation: | 1. Holst Centre, TNO‐The Dutch Organization for Applied Scientific Research, High Tech Campus 31, 5656 AE Eindhoven, the Netherlands;2. Department of Microtechnology and Chalmers University of Technology, Kemiv?gen 9, SE 412 96 G?teborg, Sweden;3. Imec, Kapeldreef 75, B‐3001 Leuven, Belgium |
| |
Abstract: | An upscalable, self‐aligned patterning technique for manufacturing high‐ performance, flexible organic thin‐film transistors is presented. The structures are self‐aligned using a single‐step, multi‐level hot embossing process. In combination with defect‐free anodized aluminum oxide as a gate dielectric, transistors on foil with channel lengths down to 5 μm are realized with high reproducibility. Resulting on‐off ratios of 4 × 106 and mobilities as high as 0.5 cm2 V?1 s?1 are achieved, indicating a stable process with potential to large‐area production with even much smaller structures. |
| |
Keywords: | organic electronics thin‐film transistors self‐alignment aluminum anodization |
|
|