| Affiliation: | 1. Department of Chemical and Biomolecular Engineering, University of Illinois at Urbana‐Champaign, Urbana, Illinois 61801, USA;2. Department of Bioengineering, University of Illinois at Urbana‐Champaign, Urbana, Illinois 61801, USA;3. Department of Mechanical Science and Engineering, University of Illinois at Urbana‐Champaign, Urbana, Illinois 61801, USA;4. Micro and Nanotechnology Laboratory, University of Illinois at Urbana‐Champaign, Urbana, Illinois 61801, USA;5. Department of Electrical and Computer Engineering, University of Illinois at Urbana‐Champaign, Urbana, Illinois 61801, USA;6. Institute of Genomic Biology, University of Illinois at Urbana‐Champaign, Urbana, Illinois 61801, USA |
