| 镜面无损检测系统 |
| |
| 引用本文： | 尹燕萍,罗庆媛,杨晓波. 镜面无损检测系统[J]. 半导体光电, 2000, 21(6): 425-427 |
| |
| 作者姓名： | 尹燕萍 罗庆媛 杨晓波 |
| |
| 作者单位： | 重庆光电技术研究所，重庆400060 |
| |
| 摘 要： | 介绍了基于“魔镜”技术原理研制的镜面无损检测系统，该检测系统已应用于Ｓｉ片和其他半导体抛光晶片的质量检测，且其用途已延已延伸到与超平镜面有关的各种技术领域，如硬盘光盘、玻璃衬底等。
|
| 关 键 词： | 魔镜技术 镜面 无损检测 半导体晶片 |
| 文章编号： | 1001-5868(2000)06-0425-03 |
| 修稿时间： | 2000-06-13 |
Non - destructive Inspection System for Characterization of Mirror - like Surfaces |
| |
| YING Yan-ping,LUO Qing-yuan,YANG Xiao-bo. Non - destructive Inspection System for Characterization of Mirror - like Surfaces[J]. Semiconductor Optoelectronics, 2000, 21(6): 425-427 |
| |
| Authors: | YING Yan-ping LUO Qing-yuan YANG Xiao-bo |
| |
| Abstract: | A mirror - like surface non - destructive inspection system manufactured based on the principle of "Makyoh" technology is introduced. This inspection system has recently been applied to evaluate Si wafers and other polished semiconductor wafers. The application has extended to various technological fields related to super - flat mirror surfaces, such as hard discs, optical discs, and glass substrates, etc. |
| |
| Keywords: | Makyoh technology mirror-like surface non-destructive inspection semiconductor wafer |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
