| 非晶碳和碳纳米管混合薄膜的场发射性能 |
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| 引用本文： | 张新月,姚宁,王英俭,张兵临. 非晶碳和碳纳米管混合薄膜的场发射性能[J]. 半导体学报, 2008, 29(8): 1484-1486 |
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| 作者姓名： | 张新月 姚宁 王英俭 张兵临 |
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| 作者单位： | 郑州航空工业管理学院数理系,郑州 450015;郑州大学材料物理教育部重点实验室，郑州 450052;中国科学院安徽光学精密机械研究所,合肥 230031;郑州大学材料物理教育部重点实验室，郑州 450052;郑州大学材料物理教育部重点实验室，郑州 450052 |
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| 基金项目： | 教育部科学技术研究重点项目，郑州航空工业管理学院校科研和教改项目 |
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| 摘 要： | 利用微波等离子体化学气相沉积法在不锈钢衬底上直接合成非晶碳和碳纳米管混合薄膜.采用氢气和甲烷作为反应气体,流量分别为100和16sccm.沉积室内的压强为5.0kPa.利用场发射扫描电镜(SEM)和喇曼谱(Raman)对制备的薄膜的结构和形貌进行了分析.场发射实验在5×10-5Pa的真空下进行.实验结果表明:制备的非晶碳和碳纳米管混合薄膜开启电场较低,仅有0.9V/μm;在电场为3.7V/p.m时电流密度达到4.0mA/cm2,发射点密集,分布均匀.表明此种材料是一种优良的场发射冷阴极材料.
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| 关 键 词： | 非晶碳 碳纳米管 场发射 |
| 修稿时间： | 2008-04-06 |
Field Emission from a Mixture of Amorphous Carbon and Carbon Nanotubes Films |
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| Zhang Xinyue,Yao Ning,Wang Yingjian and Zhang Binglin. Field Emission from a Mixture of Amorphous Carbon and Carbon Nanotubes Films[J]. Chinese Journal of Semiconductors, 2008, 29(8): 1484-1486 |
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| Authors: | Zhang Xinyue Yao Ning Wang Yingjian Zhang Binglin |
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| Affiliation: | Zhengzhou Institute of Aeronautical Industry Management,Zhengzhou 450015,China;Key Laboratory of Material Physics of the Ministry of Education,Zhengzhou University,Zhengzhou 450052,China;Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Key Laboratory of Material Physics of the Ministry of Education,Zhengzhou University,Zhengzhou 450052,China;Key Laboratory of Material Physics of the Ministry of Education,Zhengzhou University,Zhengzhou 450052,China |
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| Abstract: | A mixture of amorphous carbon and carbon nanotubes films was synthesized on stainless steel plates by a microwave plasma enhanced chemical vapor deposition system.The source gases were hydrogen and methane with flow rates of 100 and 16sccm,respectively,with a total pressure of 5.0kPa.The surface morphology and the structure of the films were characterized by field emission scanning electron microscopy(SEM)and Raman scattering spectroscopy.Field emission properties of as-deposited film were measured in a vac... |
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| Keywords: | amorphous carbon carbon nanotubes film field electron emission |
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