| TDL-J60S激光晶体炉的开发研制 |
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| 引用本文： | 董淑梅,王庆. TDL-J60S激光晶体炉的开发研制[J]. 电子工业专用设备, 2003, 32(6): 51-54 |
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| 作者姓名： | 董淑梅 王庆 |
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| 作者单位： | 西安理工大学晶体生长设备研究所,西安,710048 |
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| 摘 要： | 介绍了一种新开发的TDL-J60S激光晶体炉设备,设备的机械结构及电气控制,着重介绍 该设备的创新单元技术,上称重自动等径控制系统。
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| 关 键 词： | 激光单晶炉 提拉系统 自动控径 |
| 文章编号： | 1004-4507(2003)06-0051-04 |
| 修稿时间： | 2003-09-25 |
Research and Development of the TDL-J60S Laser Crystal Growth Furnace |
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| Dong Shu Mei,Wang Qin Xi''''an University of Technology Crystal Growing Equipment Research Institute. Research and Development of the TDL-J60S Laser Crystal Growth Furnace[J]. Equipment for Electronic Products Marufacturing, 2003, 32(6): 51-54 |
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| Authors: | Dong Shu Mei Wang Qin Xi''''an University of Technology Crystal Growing Equipment Research Institute |
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| Abstract: | This paper introduces a new Laser crystal growth furnace-TDL-J60S that developed newly, mechanical structure and electric control of the furnace, mainly introduces a innovation cell technology , automatic diameter control system. |
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| Keywords: | Laser Crystal Growth Furnace Puller System Automatic Diameter Control |
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