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石英陀螺闭环自激驱动电路(英文)
引用本文:王庆一,陈伟平,尹亮,刘晓为,周治平.石英陀螺闭环自激驱动电路(英文)[J].纳米技术与精密工程,2012(6):497-502.
作者姓名:王庆一  陈伟平  尹亮  刘晓为  周治平
作者单位:[1]哈尔滨工业大学微电子科学与技术系,哈尔滨150001 [2]微系统与微结构制造教育部重点实验室,哈尔滨150001
基金项目:基金项目:国家重点基础研究发展计划(973计划)资助项目(2012CB934104).
摘    要:为使石英陀螺满足高性能、小型化和集成化需求,设计石英陀螺专用集成电路接口芯片势在必行.本文通过分析石英陀螺表头的机电特性,得出方波驱动方式是系统性能和复杂程度的折衷.据此设计了一种闭环自激驱动电路.该电路与石英结构形成反馈环路,从而实现陀螺的自激驱动,并通过自动增益控制电路实现幅值稳定.该电路已用0.5μm CMOS工艺实现,测试结果表明该电路可以实现稳幅稳频的驱动,幅值稳定度0.01%.集成该驱动电路的石英陀螺系统达到战术级性能.

关 键 词:石英陀螺  专用集成电路  驱动电路

A Closed-Loop Self-Excited Drive Circuit for Quartz Gyroscope
WANG Qing-yi,CHEN Wei-ping,YIN Liang,LIU Xiao-wei,ZHOU Zhi-ping.A Closed-Loop Self-Excited Drive Circuit for Quartz Gyroscope[J].Nanotechnology and Precision Engineering,2012(6):497-502.
Authors:WANG Qing-yi  CHEN Wei-ping  YIN Liang  LIU Xiao-wei  ZHOU Zhi-ping
Affiliation:1. Department of Microelectronics, Harbin Institute of Technology, Harbin 150001, China; 2. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin 150001, China)
Abstract:In order to satisfy the requirement of high performance, miniaturization and integration for quartz gyroscope, design of the application-specific integrated circuit (ASIC) interface chip is the trend. In this paper, it is derived that a square wave drive mode is the tradeoff of system performance and complexity based on the analysis of electrical and mechanical characteristics of the element. A closed-loop self-excited drive circuit is designed based on the above conclusion. This circuit together with the quartz element comprise the closed-loop that achieves the self-excited oscillation, and an automatic gain control module maintains the stability of the vibration amplitude. The closedoop self-excited drive circuit is realized in a 0.5 μm CMOS process. The test results show that the designed circuit accomplishes a drive signal with stable amplitude and frequency, with the amplitude stability of 0.01%. The performance of the quartz gyroscope integrated with this circuit can satisfy the tactical requirement.
Keywords:quartz gyroscope  application-specitic integrated circuit (ASIC)  drive circuit
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