| 简谈多晶硅副产物四氯化硅的利用途径 |
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| 引用本文： | 唐玉泉,李光茜,董涛. 简谈多晶硅副产物四氯化硅的利用途径[J]. 低温与特气, 2010, 28(4): 10-13. DOI: 10.3969/j.issn.1007-7804.2010.04.004 |
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| 作者姓名： | 唐玉泉 李光茜 董涛 |
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| 作者单位： | 昆明冶研新材料股份有限公司,云南,昆明,650031;光明化工研究设计院,辽宁,大连,116031 |
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| 摘 要： | 随着国内多晶硅产业的蓬勃发展,多晶硅主要副产物四氯化硅的环境污染问题日益突出。有效利用四氯化硅、减少环境污染是当前必须要解决的首要问题。探讨了目前多晶硅生产中副产物四氯化硅的利用途径。
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| 关 键 词： | 多晶硅 副产物 四氯化硅 利用途径 |
Elementary Introduction Utilization Ways of Silicon Tetrachloride, the Byproduct of Polysilicon |
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| TANG Yuquan,LI Guangqian,DONG Tao. Elementary Introduction Utilization Ways of Silicon Tetrachloride, the Byproduct of Polysilicon[J]. Low Temperature and Specialty Gases, 2010, 28(4): 10-13. DOI: 10.3969/j.issn.1007-7804.2010.04.004 |
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| Authors: | TANG Yuquan LI Guangqian DONG Tao |
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| Affiliation: | TANG Yuquan1,LI Guangqian1,DONG Tao2(1.Kunming Yeyan New Material Co.,Ltd.,Kunming 650031,China,2.Guangming Research and Design Institute of Chemical Industry,Dalian 116031,China) |
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| Abstract: | With the rapid development of domestic polysilicon industry,problems existing in safety and environmental pollution,caused by silicon tetrachloride,main byproducts produced during the polysilicon production,are increasingly prominent.Effective use of silicon tetrachloride and reducing environmental pollution is currently the most important issue must be addressed.This paper discusses utilization ways of silicon tetrachloride in current polysilicon production. |
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| Keywords: | polysilicon byproduct silicon tetrachloride utilization ways |
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