| 激光纳米尺度先进加工技术 |
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| 引用本文： | 黄英奇,程兆谷,谌巍,赵全忠,高海军,柴雄良. 激光纳米尺度先进加工技术[J]. 激光与光电子学进展, 2003, 40(7): 20-25 |
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| 作者姓名： | 黄英奇 程兆谷 谌巍 赵全忠 高海军 柴雄良 |
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| 作者单位： | 1. 泉州师范学院物理系,福建,362000
2. 中国科学院上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 综述了激光-扫描探针显微镜（Laser-SPM)纳米尺度加工先进技术及激光纳米结构先进加工技术。
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| 关 键 词： | 激光-扫描探针显微镜 纳米尺度加工 激光纳米结构 激光辅助直接印制 清洁 |
| 收稿时间： | 2002-12-30 |
Advanced Laser Material Nanoprocessing Techniques |
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| HUANG Yingqi,CHENG Zhaogu,ZHAO Quanzhong,GAO Haijun,SHEN Wei,CHAI Xiongliang. Advanced Laser Material Nanoprocessing Techniques[J]. Laser & Optoelectronics Progress, 2003, 40(7): 20-25 |
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| Authors: | HUANG Yingqi CHENG Zhaogu ZHAO Quanzhong GAO Haijun SHEN Wei CHAI Xiongliang |
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| Abstract: | The advanced technology of laser-scanning probe microscope (SPM) nanoprocessing is presented and some other laser nanoprossessing techniques is concerned as well. |
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| Keywords: | laser nanotechnology SPM advanced processing technology |
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