| 基于Arnoldi算法的MEMS微梁的宏建模 |
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| 引用本文： | 吕湘连,苑伟政,李伟剑,霍鹏飞,姜澄宇.基于Arnoldi算法的MEMS微梁的宏建模[J].西北工业大学学报,2005,23(3):411-415. |
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| 作者姓名： | 吕湘连 苑伟政 李伟剑 霍鹏飞 姜澄宇 |
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| 作者单位： | 西北工业大学,微/纳米系统实验室,陕西,西安,710072 |
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| 基金项目： | 国家自然科学基金(50375125)，博士点基金(2003069903、20040699009)资助 |
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| 摘 要： | 微机电系统通常涉及机、电、流体、热等多个耦合能量域，其设计与分析需要通过宏建模来降低复杂度。论文根据系统传递函数矩匹配原理，提出将Arnoldi算法与Taylor展开相结合来实现MEMS器件行为的宏建模，建立了典型MEMS微梁的宏模型。与有限差分法相对比，该方法可以较准确地实现MEMS器件的快速动态仿真。
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| 关 键 词： | MEMS 宏建模 Arnoldi算法 Taylor展开 |
| 文章编号： | 1000-2758(2005)03-0411-05 |
| 修稿时间： | 2004年7月1日 |
Arnoldi-Algorithm-Based Macromodeling for Coupled-Domain MEMS Device |
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| Lu Xianglian,Yuan Weizheng,Li Weijian,Huo Pengfei,Jiang Chengyu.Arnoldi-Algorithm-Based Macromodeling for Coupled-Domain MEMS Device[J].Journal of Northwestern Polytechnical University,2005,23(3):411-415. |
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| Authors: | Lu Xianglian Yuan Weizheng Li Weijian Huo Pengfei Jiang Chengyu |
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| Abstract: | Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system(MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy. |
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| Keywords: | MEMS device macromodeling method Arnoldi algorithm Taylor series |
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