| AFM轻敲模式中微悬臂振动的研究 |
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| 引用本文： | 肖增文,赵学增,李洪波. AFM轻敲模式中微悬臂振动的研究[J]. 振动与冲击, 2006, 25(5): 183-185 |
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| 作者姓名： | 肖增文 赵学增 李洪波 |
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| 作者单位： | 哈尔滨工业大学机电工程学院,哈尔滨,150001 |
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| 摘 要： | 针对原子力显微镜AFM（Atomic torce microscope）在轻敲工作模式下微悬臂在谐振频率附近振动的问题，依据振动学理论和仿真分析的方法，建立了微悬臂的振动模型，仿真出了微悬臂前几阶的振动模态。得到了在保证振幅不变的情况下微悬臂各参数与其自由端偏转角的关系，指出了轻敲模式下减小AFM测量误差的方法。
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| 关 键 词： | 微悬臂 振动 仿真 |
| 收稿时间： | 2005-05-22 |
| 修稿时间： | 2005-07-01 |
Research on Vibration of Piezoelectric Microcantilever in Atomic Force Microscope |
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| Xiao Zengwen,Zhao Xuezeng,Li Hongbo. Research on Vibration of Piezoelectric Microcantilever in Atomic Force Microscope[J]. Journal of Vibration and Shock, 2006, 25(5): 183-185 |
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| Authors: | Xiao Zengwen Zhao Xuezeng Li Hongbo |
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| Abstract: | To solve the question that piezoelectric microcantilever in atomic force microscope (AFM) vibrates at the frequency nearby resonance in tapping mode, the vibration model of microcantilever is proposed and the first several vibration modes are simulated. The relations between microcantilever parameters and its free end deflexion angle are acquired and the method of reducing measurement error of AFM in tapping mode is presented. |
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| Keywords: | AFM |
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