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基于PDMS纳米粒子改性的热模压技术
引用本文:汪鹏,陈翔,肖丽君,朱军,陈迪. 基于PDMS纳米粒子改性的热模压技术[J]. 功能材料与器件学报, 2009, 15(5)
作者姓名:汪鹏  陈翔  肖丽君  朱军  陈迪
作者单位:上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海,200030;上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海,200030;上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海,200030;上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海,200030;上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海,200030
基金项目:国家863资助项目,微米/纳米加工技术国家重点实验室基金 
摘    要:介绍了一种采用纳米SiO2、TiO2改性聚二甲基硅氧烷(PDMS)的方法,研究了两种纳米材料SiO2、TiO2添加的比例对热压效果的影响及优化条件,并分析了其改性后的热膨胀系数及杨氏模量的变化,以及其改性后热压效果的提高进行了初步分析,最后用改性的PDMS材料,快速成型来制造热压模具,热压制作聚甲基丙烯酸甲酯(PMMA)微流控芯片。与常用的金属模具(如镍模具)相比,此方法具有脱模容易,工艺周期短,难度低,重复性好,价格低等优点。

关 键 词:PDMS改性  纳米粒子  热模压  微流控

Mechanical modification of PDMS by blending with nano particles as hot embossing mold
WANG Peng,CHEN Xiang,XIAO Li-jun,ZHU Jun,CHEN Di. Mechanical modification of PDMS by blending with nano particles as hot embossing mold[J]. Journal of Functional Materials and Devices, 2009, 15(5)
Authors:WANG Peng  CHEN Xiang  XIAO Li-jun  ZHU Jun  CHEN Di
Abstract:A simple method was presented to fabricate tool for hot embossing by modifying PDMS (polydimethylsiloxane) with nano particles, such as SiO_2 , TiO_2. The effect of the mix ratio of PDMS and these two kinds of nano particles on hot embossing as well as the optimum conditions was investigated. In order to improve the efficiency of hot embossing, primary analysis was made by analyzing the variation of Youngs modulus and thermal coefficient expansion of modified PDMS which were studied by thermal ana-lyzer. This modified PDMS was used to fabricate mold by rapid prototyping, which was then used to fabri-cate polymethyl methacrylate (PMMA) mircofludic chips by hot embossing. Compared with the conven-tional hot embossing mold, such as metal mold and silicon mold, this modified PDMS mold is of excellent duplicate of microstructures, very rapid, low cost, and reduction in complexity, what's more, the molds are released easily, and have has a good reproducibility.
Keywords:modifying of PDMS  nano particles  hot embossing  mircofludics
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