基于刀具底部散热方式的HFCVD法沉积金刚石涂层刀具温度场的仿真优化

用热丝化学气相沉积法(hot filament chemical vapor deposition，HFCVD)制备金刚石涂层刀具时，衬底温度对金刚石涂层分布的均匀性有重要影响。利用仿真软件ANSYS中的FLUENT模块，对GAMBIT中建立的三维HFCVD批量刀具反应模型进行分析，并运用耦合热传导、热对流、热辐射等3大传热方式对该模型衬底温度分布情况进行仿真预测，对影响涂层分布均匀性的刀具底部支撑台材料散热方式进行分析、优化。仿真结果显示:相较于传统的铜质支撑台和石墨支撑台，热导率小的陶瓷材料支撑台的刀体平均温差最小，为37.82 ℃，比采用铜材料为支撑台时的刀体平均温差降低了45 ℃，更有利于制备膜厚、质量均匀的CVD金刚石涂层刀具。 

Simulation and optimization of temperature field of diamond coated tools deposited by HFCVD method based on heat dissipation at tool bottom

In the process of preparing diamond coated tools by a hot filament chemical vapor deposition (HFCVD) method, substrate temperature has an important effect on the uniformity of diamond coating distribution. FLUENT module in ANSYS software is used to analyze a three-dimensional batch tool model of HFCVD by GAMBIT software. In simulation, three heat transfer approaches, namely conduction, convection and radiation, are considered. The simulated investigation analyzes and optimizes the effect of the heat dissipation mode at the bottom of tools on the distribution uniformity of substrate temperature. According to the results, compared with the traditional copper or graphite holder, the ceramic holder with a low thermal conductivity have the lowest the average temperature difference between tools and holder, about 37.82 ℃, which is 45 ℃ lower than the temperature difference between tools and Cu holder. The ceramic holder will be more conducive to the preparation of uniform thickness and quality of CVD diamond coated tools.