ICF靶丸表面形貌及球度误差检测

为了对ICF靶丸的表面形貌及球度误差进行高精度测量,开发了一台五轴坐标测量机,并采用锥光全息技术的激光测头实现对靶丸表面的高精度、非接触检测。首先,根据靶丸表面的结构特点,改进了基于最小二乘的球度误差评价算法;然后,介绍了作为实验平台的五轴坐标测量机的整体配置,推导了该坐标测量机的测量数学模型,该坐标测量机可实现在多个姿态下对靶丸的非接触取点测量;最后,在相同条件下,进行了5次实验测量,其结果表明:靶丸球度误差测量的均值为0.0021 mm,标准差为2.07 x10^-4 mm。该检测方法可以满足对靶丸表面形貌及球度误差高精度、高稳定性的测量要求。

Inspection on Surface Morphology and Sphericity Error of ICF Capsule

In order to accurately measure the surface morphology and sphericity error of ICF capsule, a five-axis coordinate measuring machine is designed and the laser probe based onconoscopicholography is used. Firstly, according to the structural characteristics of the capsule surface, the sphericity error evaluation algorithm based on least squares is improved.Then, the overall configuration of a five-axis coordinate measuring machine(CMM)is introduced as an experimental platform, the measurement mathematical model of the CMM is deduced. The points on the capsule surface can be collected under a variety of gestures in the non-contact way. Finally, five measurement were made under the same working condition, the results of the experiments show that the average value of sphericity error of capsule is 0.0021mm and its standard deviation is 2.07×10^-4mm. The proposed method can meet the measurement requirement of high accuracy and high stability upon the sphericity error of capsule.