| Laser Direct Writing of Ag Films from Solution on Si Substrate |
| |
| 引用本文： | KeSUN CaibeiZHANG YanZHAO. Laser Direct Writing of Ag Films from Solution on Si Substrate[J]. 材料科学技术学报, 2003, 19(6): 634-636 |
| |
| 作者姓名： | KeSUN CaibeiZHANG YanZHAO |
| |
| 作者单位： | [1]SchoolofScience,NortheasternUniversity,Shenyang110004,China [2]InstituteofMetalResearch,ChineseAcademyofSciences,Shenyang110016,China |
| |
| 基金项目： | 国家重点基础研究发展计划(973计划) |
| |
| 摘 要： | Pulsed Nd:YAG laser was used to irradiate Si substrate immersed in AgN03 ethylene glycol solution to deposit Ag films along the lines scanned by laser on the substrate, which is a photo-thermal decomposing process. The decomposed Ag atoms congregate and form polycrystalline Ag particles. The Ag concentration changes greatly with the total laser energy^4absorbed by substrate. Transmission electron microscopy (TEM) observation shows the Ag particles are inlaid in the Si substrate. Auger electron spectrum (AES) shows that the Ag concentration decreases with the increase of the sputtering depth, and there is no oxygen element on the surface of the deposited Ag films.
|
| 关 键 词： | Ag 银薄膜 Si 硅衬底 AgN03 感光材料 Nd：YAG激光器 脉冲激光器 |
Laser Direct Writing of Ag Films from Solution on Si Substrate |
| |
| Ke SUN,Caibei ZHANG,Yan ZHAO. Laser Direct Writing of Ag Films from Solution on Si Substrate[J]. Journal of Materials Science & Technology, 2003, 19(6): 634-636 |
| |
| Authors: | Ke SUN Caibei ZHANG Yan ZHAO |
| |
| Affiliation: | School of Science, Northeastern University, Shenyang 110004, China |
| |
| Abstract: | Pulsed Nd:YAG laser was used to irradiate Si substrate immersed in AgNO3 ethylene glycol solution to deposit Ag films along the lines scanned by laser on the substrate, which is a photo-thermal decomposing process. The decomposed Ag atoms congregate and form polycrystalline Ag particles. The Ag concentration changes greatly with the total laser energyA absorbed by substrate. Transmission electron microscopy (TEM) observation shows the Ag particles are inlaid in the Si substrate. Auger electron spectrum (AES) shows that the Ag concentration decreases with the increase of the sputtering depth, and there is no oxygen element on the surface of the deposited Ag films. |
| |
| Keywords: | Pulsed Nd:YAG laser Laser direct writing Ag deposited film Si substrate |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《材料科学技术学报》浏览原始摘要信息 |
|
点击此处可从《材料科学技术学报》下载全文 |
