微波液相沉积法制备二氧化钛薄膜

采用微波液相沉积法(MWLPD),在低温下制备出了性能优异的锐钛矿型TiO2薄膜.通过XRD、SEM分析手段研究了薄膜和粉体的结晶度、晶粒尺寸、表面形貌等.实验结果表明,所得薄膜不仅具有良好的结晶形貌、表面形貌及可见光透过率,还具有特殊的表面凸起结构,能有效提高薄膜的比表面积,有助于提高TiO2薄膜的光催化性能.且整个制备过程无需热处理,成膜周期短,效率较高.

TiO2 Films Prepared by Microwave Irradiated Liquid Phase Deposition

TiO_2 films are deposited on glass substrates by using MW irradiated LPD method at low temperature. The properties of films are studied via XRD, SEM etc. As a result, the obtained films show fine homogeneity, optical transparence and a high degree of crystallinity (anatase) without further thermal treatment,and besides, the specious surface structure increases surface area and is helpful to improve its photo catalytic activity. Furthermore, the preparation time decreases markedly compared with general method.