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共溅射法制备的Pt-C薄膜的微观结构和电化学性能的研究
引用本文:廖建平,遇鑫遥,刘杰,蒋仲庆,舒兴胜,孟月东. 共溅射法制备的Pt-C薄膜的微观结构和电化学性能的研究[J]. 真空科学与技术学报, 2012, 32(4): 352-356
作者姓名:廖建平  遇鑫遥  刘杰  蒋仲庆  舒兴胜  孟月东
作者单位:中科院等离子体物理研究所,合肥,230031
摘    要:用共溅射的方法制备了Pt-C薄膜,薄膜由Pt纳米粒子和非晶C组成。电子显微镜和X射线衍射的测试结果显示Pt纳米粒子镶嵌在非晶C之中。高分辨率透射电子显微图像证实了2~3 nm的Pt粒子镶嵌于非晶C层中。Pt和Pt-C薄膜的电化学特性是通过循环伏安法来研究的,电解液为氮气饱和的0.5g/mol的硫酸溶液。与纯Pt薄膜相比,Pt-C薄膜显示了更高的电化学活性面积,这主要是由于非晶C支撑基材的存在降低了Pt纳米颗粒的粒径。

关 键 词:共溅射  Pt薄膜  Pt-C薄膜  电化学活性面积

Microstructures and Electrochemical Properties of Co-Sputtered Pt-C Composite Films
Liao Jianping , Yu Xinyao , Liu Jie , Jiang Zhongqing , Shu Xingsheng , Meng Yuedong. Microstructures and Electrochemical Properties of Co-Sputtered Pt-C Composite Films[J]. JOurnal of Vacuum Science and Technology, 2012, 32(4): 352-356
Authors:Liao Jianping    Yu Xinyao    Liu Jie    Jiang Zhongqing    Shu Xingsheng    Meng Yuedong
Affiliation:(Institute of Plasma Physics,Chinese Academy of Sciences,Hefei 230031,China)
Abstract:The nano-structured Pt-C films were deposited by co-sputtering of Pt and C targets on substrates of carbon and Si.The microstructures and properties of the Pt-C films were characterized with X-ray diffraction,X-ray photoelectron spectroscopy,high resolution transmission electron microscopy,and cyclic voltammetry.The results show that the Pt nano-particles,2~3 nm in diameter,embedded in an amorphous C matrix,dominates in the Pt-C films.The cyclic voltammetry study of the Pt and Pt-C films,in N2-saturated 0.5 g/mol H2SO4 aqueous solution,indicates that the Pt-C films possess a much larger area with high electrochemical activity than that of the control sample,possibly because of the small size of the carbon-isolated Pt nano-particle.
Keywords:Co-sputtering  Pt thin film  Pt-C thin film  Electrochemically active surface area
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