| 球差对电子束轰击炉电子光学系统磁聚焦的影响研究 |
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| 引用本文： | 刘春东,张东辉,梁建明,朱春华. 球差对电子束轰击炉电子光学系统磁聚焦的影响研究[J]. 真空科学与技术学报, 2012, 32(9): 802-804 |
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| 作者姓名： | 刘春东 张东辉 梁建明 朱春华 |
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| 作者单位： | 河北建筑工程学院 张家口075024 |
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| 基金项目： | 河北省科技厅项目(07215632) |
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| 摘 要： | 对电子束轰击炉电子光学系统磁聚焦过程中产生的球差进行了研究。分析了有限放大倍数下磁透镜产生的球差系数。根据两个磁透镜各自的球差系数建立了双聚焦系统球差系数的数学模型。为减小球差对双聚焦系统聚焦效果的影响提供理论依据。
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| 关 键 词： | 有限放大倍数 双聚焦系统 球差系数 磁透镜 |
Influence of Spherical Aberration on Magnetic Focusing in Electron Beam Bombardment Furnace |
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| Liu Chundong , Zhang Donghui , Liang Jianming , Zhu Chunhua. Influence of Spherical Aberration on Magnetic Focusing in Electron Beam Bombardment Furnace[J]. JOurnal of Vacuum Science and Technology, 2012, 32(9): 802-804 |
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| Authors: | Liu Chundong Zhang Donghui Liang Jianming Zhu Chunhua |
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| Affiliation: | (Hebei Institute of Architecture Cilil Engineering,Zhangjiakou 075024,China) |
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| Abstract: | The influence of the spherical aberration,originated from the electron optical system in the electron bombardment furnace,on magnetic focusing was theoretically studied.The negative impacts of the spherical aberration on the performance of the electron beam bombardment furnace were also tentatively discussed.The coefficients of the spherical aberration generated by the magnetic lenses with limited amplifications were calculated via data fitting.The spherical aberration coefficient of the double focusing system was modeled and calculated in terms of the individual coefficient of the spherical aberration of the two magnetic lenses.We suggest that the calculated results may help reduce the bad effect of spherical aberration on the magnetic focusing. |
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| Keywords: | Limited amplified multiples Double focusing system Coefficients of spherical Magnetic lens |
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