Silicon X-Ray Detector With Integrated Thin-Film Transistor for Biomedical Applications |
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| Authors: | Wang K Karim K S |
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| Affiliation: | Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, Canada; |
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| Abstract: | A novel silicon X-ray detector with an integrated thin-film-transistor (TFT) readout circuit is presented. The device consists of a bulk-silicon photodiode and a TFT atop the photodiode. X-ray photons are absorbed and converted to electronic charges by the bulk-silicon photodiode and then read out via the modulation of the TFT drain–source current through an internal gate. Such a device is promising for low-energy X-ray or gamma-ray applications including protein crystallography and X-ray spectroscopy. |
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