利用空域采样相移干涉计量法测量微小位移

提出了一种利用空域采样实现相移干涉计量的新方法和实验演示装置。演示装置使用倾斜镜或阶梯镜作为相移器件,线阵CCD做为光学传感器。实验表明:此方法非常适用于测量快速变化的目标或动态过程,其测量精度与传统时域采样相移技术相当但具有更好的稳定性和更高的测量速度,而测量范围是离焦量的2倍。

Measurement of micro-displacement by means of phase shift interferometry with spatial domain sampling

A new method and an experimental unit for realizing phase shift interferometry by means of spatial domain sampling is proposed. The unit uses fast-steering mirror or echelon lens as phase shift device, linear array CCD as optical sensor. The experiments show that the method is very suitable for measuring fast variation targets or dynamic process. Its measuring accuracy is equivalent to that of traditional phase shift technique of time-domain sampling, with a better stability and higher measuring speed. Its measuring range is two times of the off-defocus amount.