基于数字微镜器件的朗契检验

将传统的朗契检验原理、数字微镜器件和同位相探测方法结合起来,快速、较高精度地检测球面非球面透镜或大量值波像差.用数字微镜器件作为记录介质,代替普通的照相胶片,实时记录计算全息图.实验时先通过编制的程序,在计算机的控制下,在小数字微镜器件上显示一个光栅图像.然后将此小数字微镜器件放入朗契检验装置中.通过程序让光栅像移动与转动,并相应拍摄一系列朗契图像.最后进行分析计算.它的优点是代替普通的光学光栅和步进电机,并在测试中不要实际地移动与转动光栅.这样去除了因电机移动和光栅转动引起的测量误差,节省了时间.分析了数字微镜器件在光电测试中的应用特性.用同位相探测方法对球面进行了测量与计算,并进行了此球面的波面复原,给出了波像差的二维、三维图.

Ronchi test based on digital micromirror device

The combination of conventional Ronchi test, a digital micromirror device and synchronous phase detection method was used to measure a spheric or an aspheric wavefront, or a large wavefront aberration more quickly and accurately. Instead of using a common film, a digital micromirror device was used as a record material for real-time recording a computer generated hologram. In the testing process, a grating image was shown on the digital micromirror device firstly, controlled under a computer program, Then, a digital micromirror device was put into the setup of Ronchi test, and the image of grating was moved laterally and rotationally under control of the program, and a series of Ronchigrams were taken. Finally, analysis and computation were done. The advantage of this method was that an ordinary grating and a servomotor were unnecessary compared to the traditional Ronchi test, and mechanical lateral and rotary moving of the grating as used in the traditional method was not needed, too. Errors caused by the lateral and rotary moving were got rid of and time was saved. The characteristic of the digital micromirror device in optoelectronic measurement was analyzed in this paper. A spherical surface was tested and computed by synchronous phase detection method. The wavefront aberration of the spherical surface was restored, a two-dimensional contour line map and a three-dimensional stereo diagram of wavefront aberration were given.