材料制备工艺 |
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摘 要: | Y2000-62067-112 0009386三族氮化物在 MOVPE 系统中的生长特性=Propertiesof Group Ⅲ Nitrides grown in production type MOVPEsystems[会,英]/Protzmann,H.& Schoen,O.//1998IEEE International Conference on Optoelectronic and Mi-croelectronic Materials and Devices.—112~115(EC)
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