| 400mm薄镜面主动光学试验系统 |
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| 引用本文： | 李宏壮,林旭东,刘欣悦,王富国,杨飞,明名,王建立,韩昌元.400mm薄镜面主动光学试验系统[J].光学精密工程,2009,17(9):2076-2083. |
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| 作者姓名： | 李宏壮 林旭东 刘欣悦 王富国 杨飞 明名 王建立 韩昌元 |
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| 作者单位： | 1. 中国科学院,长春光学精密机械与物理研究所,吉林,长春,130033
2. 中国科学院,长春光学精密机械与物理研究所,吉林,长春,130033;中国科学院,研究生院,北京,100039 |
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| 基金项目： | 中科院三期创新工程资助项目 |
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| 摘 要： | 采用400mm口径，12mm厚的球面反射镜进行了主动光学实验，通过背部12个主动支撑点校正面形，实验中通过干涉仪测试镜面面形，采用阻尼最小二乘法计算各支撑点的校正力。通过校正，将初始状态的1.22波长RMS的面形误差校正到0.12波长RMS，接近了镜面加工的0.1波长RMS面形精度，说明所采用的主动校正过程是正确可行。
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| 关 键 词： | 主动光学 主动支撑 阻尼最小二乘法 |
| 收稿时间： | 2008-10-06 |
| 修稿时间： | 2008-11-06 |
Experiment system of 400 mm thin-mirror active optics |
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| LI Hong-zhuang,Lin Xu-dong,LIU Xin-yue,WANG Fu-guo,YANG Fei,MING Ming,WANG Jian-li,HAN Chang-yuan.Experiment system of 400 mm thin-mirror active optics[J].Optics and Precision Engineering,2009,17(9):2076-2083. |
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| Authors: | LI Hong-zhuang Lin Xu-dong LIU Xin-yue WANG Fu-guo YANG Fei MING Ming WANG Jian-li HAN Chang-yuan |
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| Affiliation: | LI Hong-zhuang1,Lin Xu-dong1,2,LIU Xin-yue1,WANG Fu-guo1,YANG Fei1,MING Ming1,WANG Jian-li1,HAN Chang-yuan1(1.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China,2.Graduate University of Chinese Academy of Sciences,Beijing 100039,China) |
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| Abstract: | An active optical experiment was carried out by a mirror with a diameter of 400 mm and a thickness of 12 mm.The support construction of the mirror included 12 active supports and 3 fixed supports,in which the active support was implemented by force actuators consisting of piezoelectric ceramic actuators and loadcells.The active supports were used for controlling the surface of the mirror,and the fixed points were used for positioning the mirror.In the experiment,the mirror surface was tested by a Zygo inter... |
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| Keywords: | Active optics active support damp least square method |
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