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High‐Modulus Spin‐On Organosilicate Glasses for Nanoporous Applications |
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| Authors: | H W Ro K Char E‐c Jeon H‐J Kim D Kwon H‐J Lee J‐K Lee H‐W Rhee C L Soles D Y Yoon |
| Affiliation: | 1. Polymers Division, National Institute of Standards & Technology, Gaithersburg, MD 20899, USA;2. Department of Chemistry, Seoul National University, Seoul 151‐747, Korea;3. School of Chemical & Biological Engineering, Seoul National University, Seoul 151‐742, Korea;4. School of Materials Science & Engineering, Seoul National University, Seoul 151‐747, Korea;5. Department of Chemical Engineering, Sogang University, Seoul 121‐742, Korea |
| Abstract: | |
| Keywords: | Films Glasses Nanoporous materials Organosilicates |