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High‐Resolution Patterning of Aluminum Thin Films with a Water‐Mediated Transfer Process |
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| Authors: | B. H. Lee Y. H. Cho H. Lee K.‐D. Lee S. H. Kim M. M. Sung |
| Affiliation: | 1. Department of Chemistry, Hanyang University, Seoul 133‐791 (Korea);2. Devices & Materials Lab, LG Electronics Institute of Technology, Seoul 137‐724 (Korea) |
| Abstract: | |
| Keywords: | Lithography Metals Nanopatterning Polydimethoxysilane Soft lithography |