3‐D Integrated All‐Solid‐State Rechargeable Batteries |
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Authors: | P?H?L Notten F Roozeboom R?A?H Niessen L Baggetto |
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Affiliation: | 1. Philips Research Laboratories, High Tech Campus 4, 5656 AE Eindhoven (The Netherlands);2. Department of Chemical Engineering and Chemistry, Eindhoven University of Technology (TU/e), Den Dolech 2, 5600 MB Eindhoven (The Netherlands);3. NXP Semiconductors Research, High Tech Campus 4, 5656 AE Eindhoven (The Netherlands);4. Department of Applied Physics, Eindhoven University of Technology (TU/e), Den Dolech 2, 5600 MB Eindhoven (The Netherlands) |
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Abstract: | Portable society urgently calls for integrated energy supplies. This holds for autonomous devices but even more so for future medical implants. Evidently, rechargeable integrated all‐solid‐state batteries will play a key role in these fields, enabling miniaturization, preventing electrode degradation upon cycling and electrolyte leakage. Planar solid‐state thin film batteries are rapidly emerging but reveal several potential drawbacks, such as a relatively low energy density and the use of highly reactive lithium. Thin film Si‐intercalation electrodes covered with a solid‐state electrolyte are found to combine a high storage capacity of 3500 mAh g–1 with high cycle life, enabling to integrate batteries in Si. Based on the excellent intercalation chemistry of Si, a new 3D‐integrated all‐solid‐state battery concept is proposed. High aspect ratio cavities and features, etched in silicon, will yield large surface area batteries with anticipated energy density of about 5 mWh μm–1 cm–2, i.e. more than 3 orders of magnitude higher than that of integrated capacitors. |
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Keywords: | Batteries lithium‐ion Biomedical applications Intercalation Portable energy sources Wireless devices |
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