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Synthesis of Vertical High‐Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template |
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| Authors: | T Shimizu T Xie J Nishikawa S Shingubara S Senz U Gösele |
| Affiliation: | 1. Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle (Germany);2. Faculty of Engineering and HRC, Kansai University, Yamate‐cho 3‐3‐35, Suita, Osaka 564‐8680 (Japan) |
| Abstract: | |
| Keywords: | Alumina anodic Electroless deposition Epitaxial growth Nanowires inorganic Nanowires silicon Silicon Template‐directed assembly Vapor– liquid– solid synthesis |