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Self‐Assembled Si Quantum‐Ring Structures on a Si Substrate by Plasma‐Enhanced Chemical Vapor Deposition Based on a Growth‐Etching Competition Mechanism |
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| Authors: | L. W. Yu K. J. Chen J. Song J. Xu W. Li H. M. Li M. Wang X. F. Li X. F. Huang |
| Affiliation: | National Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Nanjing 210093 (P.R. China) |
| Abstract: | |
| Keywords: | Chemical vapor deposition, plasma‐enhanced Nanostructures Self‐assembly Semiconductors Silicon |