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High Definition Digital Fabrication of Active Organic Devices by Molecular Jet Printing
Authors:J Chen  V Leblanc  S?H Kang  P?J Benning  D Schut  M?A Baldo  M?A Schmidt  V Bulovi?
Affiliation:1. Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA 02139 (USA);2. Hewlett‐Packard Company, Corvallis, OR 97330 (USA)
Abstract:We introduce a high resolution molecular jet (MoJet) printing technique for vacuum deposition of evaporated thin films and apply it to fabrication of 30 μm pixelated (800 ppi) molecular organic light emitting devices (OLEDs) based on aluminum tris(8‐hydroxyquinoline) (Alq3) and fabrication of narrow channel (15 μm) organic field effect transistors (OFETs) with pentacene channel and silver contacts. Patterned printing of both organic and metal films is demonstrated, with the operating properties of MoJet‐printed OLEDs and OFETs shown to be comparable to the performance of devices fabricated by conventional evaporative deposition through a metal stencil. We show that the MoJet printing technique is reconfigurable for digital fabrication of arbitrary patterns with multiple material sets and high print accuracy (of better than 5 μm), and scalable to fabrication on large area substrates. Analogous to the concept of “drop‐on‐demand” in Inkjet printing technology, MoJet printing is a “flux‐on‐demand” process and we show it capable of fabricating multi‐layer stacked film structures, as needed for engineered organic devices.
Keywords:Light‐emitting diodes  organic  Molecular imprinting  Thin films  polymer
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