基于SPM的纳米加工技术研究进展

扫描探针显微镜(SPM)使人们不仅可以观察到物质表面的微观形貌,还可以在微纳米尺度上对样品表面进行加工,这种方法有可能成为未来微纳米器件的主要制作方法,成为推动人类科学和技术发展的新动力。主要介绍基于SPM的三种纳米加工方法:单原子操纵法、阳极氧化法和机械刻蚀法。详细阐述了各自的原理、特点及发展状况,并指出阳极氧化法是目前最有可能应用在实际生产制造中的加工方法,而机械刻蚀法则不仅可以作为纳米加工的手段,还可以应用于纳米加工机理方面的研究。

PRESENT SITUATION AND DEVELOPMENT OF NANOMACHINING BASED ON SCANNING PROBE MICROSCOPE

The scanning probe microscope (SPM), which was invented for imaging the surface at the atomic level, is becoming a promising method for nano/micro machining on solid surface. This method may be the main way for fabrication of nano/micro devices in the future. Three machining methods based on SPM are introduced: single atom manipulation, anode oxidation and mechanical nanomachining. Their features, principles and present situation are discussed in detail. And the anode oxidation nanolithography is the important way which may be used in many manufacture fields. While the mechanical nanomachining can not only be applied to nanolithography fields, but also to the research of nanomachining mechanism.